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Product Overview »  Mass Flow Controllers / Flow Meters

Mass Flow Controllers / Flow Meters

GFC mass flow controller


GFC mass flow controller

Product Summary


GFC low cost aluminum or stainless steel thermal mass flow controllers


Design Features

  • ± 1% FS accuracy is standard
  • rigid metallic construction
  • available flow ranges starting from 0 to 10 sccm up to 0 to 1000 slpm
  • maximum pressure of 1000 psig (70 bars)
  • leak integrity 1 x 10-9 sccs of helium
  • NIST traceable certification
  • built-in tiltable LCD readout (some models)
  • local or remote setpoint control
  • 0-5 Vdc and 4-20 mA signals
  • circuit protection
  • totalizer option

GFM mass flow meter


GFM mass flow meter

Product Summary


GFM low cost aluminum or stainless steel thermal mass flow meters


Design Features

  • ± 1% FS accuracy is standard
  • rigid metallic construction
  • available flow ranges starting from 0 to 10 sccm up to 0 to 1000 slpm
  • maximum pressure of 1000 psig (70 bars)
  • leak integrity 1 x 10-9 sccs of helium
  • NIST traceable certification
  • built-in tiltable LCD readout (some models)
  • 0-5 Vdc and 4-20 mA signals
  • circuit protection
  • can be used as a portable device
  • engineering units or 0 to 100% displays
  • totalizer option

DPC mass flow controller


DPC mass flow controller

Product Summary


Precision Digital Mass Flow Controller with Multi-Gas functionality, Temperature and Pressure


Design Features

  • Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature.
  • Multi-Gas functionality: support for 90 different gases and gas mixes.
  • “User Defined Mixture” functionality allows to create and store up 20 custom gas mixes with up to 5 different gases each.
  • Quick (100-150 ms) response time.
  • Standard accuracy ± (0.5% RD + 0.2% FS).
  • 200 to 1 turn-down ratio.
  • Two programmable mass flow rate totalizers.
  • High, Low or In Range Alarms with preset action delay for Mass Flow, Temperature and Pressure.
  • User programmable mass flow rate Pulse Output (via SSR).
  • Extensive Self Diagnostics with status LED or OLED indication.
  • All 3 user selectable analog input and output interfaces are standard: 0-5Vdc, 0-10Vdc, 4-20mA.
  • Two user selectable digital communication interfaces (RS-232 and RS-485) are standard.
  • Optional Modbus RTU network interface with isolated RS485 transceiver.
  • User programmable solid state relay with latch option.
  • Universal 12-26 Vdc power supply input.
  • Local high contrast OLED (optional) graphic display with joystick control.
  • Free, easy-to-use configuration and calibration software (RS-232/RS-485)
  • Programmable set point table with ramping up/down capability up to 16 steps.
  • ** For LOW DIFFERENTIAL PRESSURE models, please contact us **

DPM mass flow meter


DPM mass flow meter

Product Summary


Digital Mass Flow Meter with Temperature and Pressure


Design Features

  • Multi-Parameter functionality: Mass Flow, Volumetric Flow, Gas Pressure and Temperature.
  • Multi-Gas functionality: support for 90 different gases and gas mixes.
  • “User Defined Mixture” functionality allows to create and store up 20 custom gas mixes with up to 5 different gases each.
  • Quick (< 20ms) response time.
  • Standard accuracy ± (0.5% RD + 0.2% FS).
  • 200 to 1 turndown ratio.
  • Two programmable mass flow rate totalizers.
  • High, Low or In Range Alarms with preset action delay for Mass Flow, Temperature and Pressure.
  • User programmable mass flow rate Pulse Output (via SSR).
  • Extensive Self Diagnostics with status LED or OLED indication.
  • All 3 user selectable analog output interfaces are standard: 0-5Vdc, 0-10Vdc, 4-20mA.
  • Two user selectable digital communication interfaces (RS-232 and RS-485) are standard.
  • Optional Modbus RTU network interface with isolated RS485 transceiver.
  • User programmable solid state relay with latch option.
  • Universal 9-26 Vdc power supply input.
  • Local high contrast OLED (optional) graphic display with joystick control.
  • Free, easy-to-use configuration and calibration software (RS-232/RS-485).
  • ** For LOW DIFFERENTIAL PRESSURE models, please contact us **

DFC digital mass flow controller


DFC digital mass flow controller

Product Summary


DFC programmable thermal mass flow controller with digital signal processing


Design Features

  • digital and analog modes operate
  • programmable flow configurations
  • available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
  • maximum pressure of 1000 psig (70 bars)
  • multi-drop capability of up to 256 units
  • stores calibration data for up to 10 gases
  • totalizer indicates total gas quantity
  • alarm limits for high and low gas flow
  • conversion factors for up to 256 gases
  • auto tune function for optimum control response
  • self diagnostic tests

XFM digital mass flow meter


XFM digital mass flow meter

Product Summary


XFM low cost aluminum or stainless steel digital thermal mass flow meters


Design Features

  • Supports up to 23 Engineering Units (including User Defined).
  • Stores calibration data for up to 10 gases.
  • Programmable Totalizer indicates total gas quantity.
  • High and low gas flow Alarm limits with preset delay interval.
  • Two sets of user-programmable electromechanical SPDT relays with latch option.
  • User-selectable analog 0-5 Vdc or 4-20mA outputs.
  • Internal Conversion factors for up to 32 gases.
  • Digital Interface (RS-232 / RS-485, Profibus DP available).
  • Multi-Drop Capability of up to 256 units (RS-485 option).
  • Optional Profibus DP interface with I&M functionality.
  • Automatic sensor zero offset adjustment (via digital interface or local push button).
  • Self-Diagnostic Tests.
  • Local 2 x 16 characters LCD display* with adjustable back light (optional).

AFC analog mass flow controller


AFC analog mass flow controller

Product Summary


AFC analog thermal mass flow controllers


Design Features

  • rigid metallic construction
  • available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
  • maximum pressure of 1000 psig (70 bars)
  • 0-5 Vdc or 4-20 mA signals
  • leak integrity 1 x 10-9 smL/sec of helium
  • accuracy of ±1% full scale
  • totalizer option
  • circuit protection

ZFM digital mass flow meter


ZFM digital mass flow meter

Product Summary


ZFM low cost aluminum or stainless steel digital thermal mass flow meters


Design Features

  • Multi-gas/Multi-range functionality up to 8 bar (currently for 6 gases)
  • Full scale covered flow ranges from 3.125 sml/min to 10 sl/min are available in seven models
  • Standard accuracy ± (0.5% RD + 0.2% FS) based on actual calibration
  • Universal 14-24 Vdc power supply input
  • Supports up to 46 Engineering Units (including User-defined)
  • Stores additional user- calibration table data for up to 10 gases
  • Two programmable Totalizers indicate total gas quantity
  • User-programmable Pulse Output (via SSR)
  • High and low gas flow Alarm limits with preset delay interval
  • One user-programmable solid-state relays with latch option
  • User-selectable analog 0-5 Vdc, 0-10 Vdc, or 4-20mA outputs
  • Internal conversion factors for up to 26 gases
  • Digital interface (RS-232 or RS-485) test/configuration port, optional Modbus RTU with Isolated RS-485 transceiver)
  • Multi-Drop capability of up to 247 units (RS-485 option)
  • Automatic sensor zero offset adjustment (via digital interface or local push button)
  • Extensive Self- diagnostic with status LED or OLED (optional) indication
  • Local 128 x 64 high contrast OLED (optional) graphic display with joystick control
  • Free, easy-to-use configuration and calibration software (RS-232/RS-485)

TIO Flow Totalizer, I/O, Monitor & Control


TIO Flow Totalizer, I/O, Monitor & Control

Product Summary


model TIO flow totalizer, input/output, flow monitor and controller


Design Features

  • Displays instantaneous, total and accumulated flow rates.
  • Built-in Flow Linearizer (10 point linearization of the flow curve).
  • Up to 47 different volumetric and mass flow engineering units.
  • Large 13mm (0.51") digits for flow rate and 5.5mm (0.21") for Total.
  • Digital RS-232 or RS-485 interface (multi-drop capability of up to 64 devices.)
  • Compact design for unit mount, panel mount, wall mount or field mount applications.
  • User-programmable, optically-isolated pulse output.
  • Two programmable, optically-isolated, digital outputs.
  • Flow controllers, set point command control via local LCD or digital interface.
  • Programmable set point table with ramping up/down capability up to 16 steps.
  • Free Configuration and Monitoring Utility software.

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